Title :
A 135GHz slotline bandpass filter using silicon/membrane technology
Author :
Rui Li ; Cheng Jin ; Sampath, K.P. ; Min Tang ; Soon Wee Ho ; Siong Chiew Ong
Author_Institution :
Inst. of Microelectron., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore
Abstract :
This paper presents the design and implementation of a second-order 135GHz bandpass filter (BPF) constructed on a thin suspended membrane structure. The BPF is built by cascading two U-shape slotline resonators formed on the ground plane. The input and output coupling are achieved by the microstrip line to slotline transition on the other side of the substrate. The unloaded quality (Q) factors of both I-shape and U-shape resonator due to the radiation, material and conductor loss are studied. The BPF is fabricated and measured, and it demonstrates a good agreement between the simulation and measurement results.
Keywords :
band-pass filters; conductors (electric); coupled circuits; elemental semiconductors; membranes; microstrip transitions; millimetre wave filters; resonator filters; silicon; slot lines; thin film circuits; BPF; I-shape resonator; Si; U-shape slotline resonator transition; conductor loss; frequency 135 GHz; ground plane; input coupling; microstrip line; output coupling; second-order slotline bandpass filter; silicon-membrane technology; thin suspended membrane structure; Conferences; Decision support systems; Electronics packaging; Bandpass filter (BPF); membrane; millimetre-wave (mm-wave); resonator; slotline;
Conference_Titel :
Electronics Packaging Technology Conference (EPTC), 2012 IEEE 14th
Conference_Location :
Singapore
Print_ISBN :
978-1-4673-4553-8
Electronic_ISBN :
978-1-4673-4551-4
DOI :
10.1109/EPTC.2012.6507056
