Title :
Various carbon composite pyrolyzed polymers and their electrical characterization
Author :
Akazawa, Akira ; Okamoto, Kanji ; Syunori, Atsushi ; Konishi, Satoshi
Author_Institution :
Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kusatsu, Japan
Abstract :
In this paper, we deals with various carbon composite pyrolyzed polymers. We present carbon composite pyrolyzed polymers using glassy carbon particles (φ = 8 μm), carbon microspheres (φ = 260 nm) and carbon black particles (φ = 70 nm). Carbon composite pyrolyzed polymers were prepared by pyrolysis of carbon composite photoresists at temperatures ranging from 600 to 1000°C. The carbon composite pyrolyzed polymers were characterized by a scanning electron microscopy (SEM), an atomic force microscope (AFM), four point probe measurements and cyclic voltammetry. This paper reports evaluation results of various carbon composite pyrolyzed polymers of semiconducting and electrochemical properties.
Keywords :
Hall effect; atomic force microscopy; carbon; electrochemistry; filled polymers; pyrolysis; scanning electron microscopy; semiconductor materials; vitreous state; voltammetry (chemical analysis); AFM; C; SEM; atomic force microscopy; carbon black particles; carbon composite pyrolyzed polymers; carbon microspheres; cyclic voltammetry; electrical property; electrochemical properties; four point probe analysis; glassy carbon particles; photoresists; scanning electron microscopy; semiconducting properties; temperature 600 degC to 1000 degC; Atomic measurements; Carbon; Heating; Microscopy; Plastics; Polymers; Carbon composite; Cyclic voltammetr; Four point probe mesurment; Pyrolyzed polymer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-1122-9
DOI :
10.1109/NEMS.2012.6196771