Various carbon composite pyrolyzed polymers and their electrical characterization

Author

Akazawa, Akira ; Okamoto, Kanji ; Syunori, Atsushi ; Konishi, Satoshi

Author_Institution

Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kusatsu, Japan

fYear

2012

fDate

5-8 March 2012

Firstpage

266

Lastpage

269

Abstract

In this paper, we deals with various carbon composite pyrolyzed polymers. We present carbon composite pyrolyzed polymers using glassy carbon particles (φ = 8 μm), carbon microspheres (φ = 260 nm) and carbon black particles (φ = 70 nm). Carbon composite pyrolyzed polymers were prepared by pyrolysis of carbon composite photoresists at temperatures ranging from 600 to 1000°C. The carbon composite pyrolyzed polymers were characterized by a scanning electron microscopy (SEM), an atomic force microscope (AFM), four point probe measurements and cyclic voltammetry. This paper reports evaluation results of various carbon composite pyrolyzed polymers of semiconducting and electrochemical properties.

Keywords

Hall effect; atomic force microscopy; carbon; electrochemistry; filled polymers; pyrolysis; scanning electron microscopy; semiconductor materials; vitreous state; voltammetry (chemical analysis); AFM; C; SEM; atomic force microscopy; carbon black particles; carbon composite pyrolyzed polymers; carbon microspheres; cyclic voltammetry; electrical property; electrochemical properties; four point probe analysis; glassy carbon particles; photoresists; scanning electron microscopy; semiconducting properties; temperature 600 degC to 1000 degC; Atomic measurements; Carbon; Heating; Microscopy; Plastics; Polymers; Carbon composite; Cyclic voltammetr; Four point probe mesurment; Pyrolyzed polymer;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Conference_Location

Kyoto

Print_ISBN

978-1-4673-1122-9

Type

conf

DOI

10.1109/NEMS.2012.6196771

Filename

6196771