FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon\´s mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system