CoNiMnP-AAO hard magnetic nanocomposite film for MEMS applications

Author

Tzu-Yuan Chao ; Jian-Ruei Lin ; Cheng, Yu Ting

Author_Institution

Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

fYear

2012

fDate

5-8 March 2012

Firstpage

351

Lastpage

354

Abstract

This paper presents a novel permanent magnetic CoNiMnP-AAO nanocomposite film comprising of a CoNiMnP nanowire array with a high aspect ratio (>;150). The nanocomposite synthesized by a low temperature electroplating process (at 30°C) with AAO template can exhibit a unique magnetic characteristic of vertical shape anisotropy which results in a coercivity (H_c) of 2512Oe, a remanence (B_r) up to 3616Gauss and a maximum energy product, (BH)_max, of 12.02kJ/m³. Such a simple fabrication process and excellent magnetic property reveal that permanent magnetic CoNiMnP-AAO nanocomposite is with great potential for magnetic N/MEMS applications.

Keywords

cobalt compounds; magnetic thin films; manganese compounds; micromechanical devices; nanocomposites; nanoelectromechanical devices; nickel compounds; AAO hard magnetic nanocomposite film; AAO template; CoNiMnP; fabrication process; low temperature electroplating process; magnetic N-MEMS applications; magnetic characteristic; maximum energy product; permanent magnetic nanocomposite film; vertical shape anisotropy; Artificial intelligence; Magnetic films; Magnetometers; Nanoelectromechanical systems; Propulsion; AAO; CoNiMnP; hard magnet; nanocomposite;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Conference_Location

Kyoto

Print_ISBN

978-1-4673-1122-9

Type

conf

DOI

10.1109/NEMS.2012.6196791

Filename

6196791