Backstepping Control Approach for Closed Loop Feedback Control of Atomic Force Microscope

Author

Payam, A. Farrokh ; Fathipour, M. ; Jalalifar, M.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Tehran, Tehran

fYear

2007

fDate

28-30 Dec. 2007

Firstpage

1

Lastpage

3

Abstract

In this paper a model and a nonlinear control scheme for an atomic force microscope are developed. For this reason a backstepping control algorithm is developed to achieve asymptotic cantilever tip tracking for bounded tip trajectories. In addition, the micro cantilever is modeled by the interaction between sample and cantilever with the Van der waals attraction/repulsion force (i.e., the interaction forces). Simulation results obtained confirm the effectiveness and validity of the proposed controller.

Keywords

atomic force microscopy; cantilevers; closed loop systems; feedback; nonlinear control systems; physical instrumentation control; van der Waals forces; Van der waals attraction-repulsion force; asymptotic cantilever tip tracking; atomic force microscope; backstepping control; bounded tip trajectories; closed loop feedback control; nonlinear control; Atomic force microscopy; Backstepping; Feedback control; Force control; Force feedback; Probes; Springs; Surface topography; Three-term control; Trajectory;

fLanguage

English

Publisher

ieee

Conference_Titel

Multitopic Conference, 2007. INMIC 2007. IEEE International

Conference_Location

Lahore

Print_ISBN

978-1-4244-1552-6

Electronic_ISBN

978-1-4244-1553-3

Type

conf

DOI

10.1109/INMIC.2007.4557705

Filename

4557705