Analysis of air damping in micromachined resonators

Author

Wu, Guoqiang ; Xu, Dehui ; Xiong, Bin ; Ma, Yinglei ; Wang, Yuelin ; Jing, Errong

Author_Institution

State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China

fYear

2012

fDate

5-8 March 2012

Firstpage

469

Lastpage

472

Abstract

An approach to the modeling and simulating the air damping effect on quality factor (Q) of a square plate Lamé mode microresonator is presented in this paper. Both the squeeze film damping and slide film damping are considered in the analysis procedure. The Reynolds equation and the Stoke-flow model are used to investigate the reactions of the resonant plate with the air flows in the transduction gaps and around the resonator plate surfaces, respectively. An electrical equivalent model has been derived for a microresonator operating in air. The model is realized with resistors equivalent for the slide film damping force and frequency-dependent resistors and capacitances connected in series equivalent for the squeeze film damping force. The simulated transmission characteristics are in good agreement with the experimental results for a 4.13 MHz Lamé mode microresonator.

Keywords

Q-factor; damping; flow; microcavities; micromachining; micromechanical resonators; Reynolds equation; Stoke-flow model; air damping effect; air flows; electrical equivalent model; micromachined resonators; quality factor; resonant plate; resonator plate surfaces; slide film damping; square plate Lame mode microresonator; transduction gaps; Analytical models; Atmospheric modeling; Damping; Electrodes; Films; Nanoelectromechanical systems; Resonant frequency; air damping; bulk mode microresonator; electrical equivalent model; transmission characteristic;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Conference_Location

Kyoto

Print_ISBN

978-1-4673-1122-9

Type

conf

DOI

10.1109/NEMS.2012.6196819

Filename

6196819