AMHS Software Solutions to Increase Manufacturing System Performance

Author

Wiethoff, Tony ; Swearingen, Casey

Author_Institution

Material Transp. Software, Intel Corp., Chandler, AZ

fYear

2006

fDate

22-24 May 2006

Firstpage

306

Lastpage

311

Abstract

In this work, AMHS performance challenges in a ramping 300mm wafer fabrication facilities are identified. Software solutions are described as viable, low cost, minimal fab disruption alternatives to both new and long standing AMHS challenges. Technical design and realized cost, performance, and utilization gains will be shared for various successful software enhancements to the existing fabrication facility´s automation software. The conclusion will outline at a high level some future opportunities in this space and challenges for managing these complex software systems

Keywords

factory automation; integrated circuit manufacture; materials handling; production facilities; software tools; automated materials handling system; dynamic vehicle reallocation; manufacturing system performance; parallel port delivery; proactive vehicle staging; wafer fabrication; Control systems; Costs; Fabrication; Job shop scheduling; Manufacturing automation; Manufacturing systems; Semiconductor device manufacture; Software performance; Software systems; Vehicles;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

1-4244-0254-9

Type

conf

DOI

10.1109/ASMC.2006.1638774

Filename

1638774