Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point

Author

Ishinabe, H. ; Kobayashi, Takehiko ; Wang, Dong ; Itoh, Takayuki ; Maeda, Ryutaro

Author_Institution

Micro Eng. & Micro Syst. Lab., Ibaraki Univ., Hitachi, Japan

fYear

2012

fDate

5-8 March 2012

Firstpage

615

Lastpage

618

Abstract

The super-harmonic effect has been studied using a piezoelectric micro-cantilever with a proof mass. The fabricated prototype device, comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO₂ deposited on a silicon-on-insulator (SOI) wafer, has been measured to have an eigenstate frequency of around 816 Hz. The driven frequencies of 204, 272, 409 and 816 Hz have been then converted into the resonant one via the super-harmonic vibration, corresponding to a sudden increase of output voltage, based on our preliminary characterizations.

Keywords

cantilevers; lead compounds; microfabrication; micromechanical devices; oscillators; piezoelectric devices; platinum; silicon compounds; silicon-on-insulator; titanium; Pt-Ti-PZT-Pt-Ti-SiO₂; SOl wafer; frequency 204 Hz; frequency 272 Hz; frequency 409 Hz; frequency 816 Hz; microfabricated oscillators; piezoelectric film cantilever; proof mass; prototype device; silicon-on-insulator wafer; super-harmonic effect; Acceleration; Nanoelectromechanical systems; Oscilloscopes; Sensors; Vibrations; Eigenstate frequency; Micro-cantilever; PZT thin film; Proof mass; Super-harmonic effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Conference_Location

Kyoto

Print_ISBN

978-1-4673-1122-9

Type

conf

DOI

10.1109/NEMS.2012.6196851

Filename

6196851