A study of tin oxide thin film gas sensors with high oxygen vacancies

Author

Lin, Chen ; Zhang, Dacheng ; Liu, Xiaodi

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2012

fDate

5-8 March 2012

Firstpage

693

Lastpage

697

Abstract

In this paper, gas sensors employing nanoscale tin oxide films of high oxygen vacancies were successfully made and tested in order to determine which factors affected the gas sensitivity of them. Firstly electrothermal simulations were carried out to predict the steady-state temperature distributions of the tin oxide thin film and the overall gas sensor using ANSYS™. Then the composition of the tin oxide calcined twice in O₂ was analyzed by X-ray photoelectron spectroscopy (XPS). The result of XPS showed that the tin oxide under this condition had high oxygen vacancies. Finally, the ethanol sensing and humidity sensing properties of the gas sensors at various operating voltages and calcined in different conditions were tested. The experimental results showed that high gas sensitivity of the gas sensors could be achieved by changing the internal and external factors.

Keywords

X-ray photoelectron spectra; calcination; gas sensors; humidity sensors; temperature distribution; thin film sensors; tin compounds; ANSYS^TM; SnO₂; X-ray photoelectron spectroscopy; XPS; ethanol sensor; gas electrothermal simulation; humidity sensor; oxygen vacancy; steady-state temperature distribution; thin film gas sensor; Chemicals; Heating; Sensitivity; Sputtering; gas sensitivity; gas sensors; high oxygen vacancies; tin oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Conference_Location

Kyoto

Print_ISBN

978-1-4673-1122-9

Type

conf

DOI

10.1109/NEMS.2012.6196870

Filename

6196870