Title :
Design and simulation of RF MEMS cantilever and bridge switches for high switching speed and low voltage operation and their comparison
Author :
Saha, Shimul Chandra ; Singh, Tajeshwar ; Sasther, T.
Author_Institution :
Dept. of Electron. & Telecommun., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
Abstract :
In this paper we present the design and simulations of RF MEMS cantilever and bridge switches with regard to their switching speed and pull-down voltage. The switches are required to fulfil the requirements of high speed and a moderate pull down voltage for the switching of capacitive micromachined ultrasonic transducer (CMUT) elements used for ultrasound imaging. The switch type can be either capacitive contact or DC contact, depending on the operating frequency requirement.
Keywords :
biomedical imaging; capacitive sensors; micromachining; microswitches; microwave switches; ultrasonic transducers; CMUT; DC contact; RF MEMS switches; bridge switches; cantilever switches; capacitive contact; capacitive micromachined ultrasonic transducer; low voltage operation; pull down voltage; switching speed; ultrasound imaging; Bridge circuits; Contacts; Low voltage; Probes; Radio frequency; Radiofrequency microelectromechanical systems; Signal processing; Switches; Telecommunication switching; Ultrasonic imaging;
Conference_Titel :
Signals, Circuits and Systems, 2005. ISSCS 2005. International Symposium on
Print_ISBN :
0-7803-9029-6
DOI :
10.1109/ISSCS.2005.1509868
