Title :
The start-up and preliminary operation of the 60 kV plasma ion implantation system
Author :
Kim, Ji H. ; Nikiforov, S.A. ; Shenderey, S.V. ; Rim, Geun Hie ; Kim, Jung-Ho ; You, Y.Z.
Author_Institution :
Korea Electrotechnol. Res. Inst., Gyeongnam, South Korea
Abstract :
Summary form only given, as follows. The paper presents the result of start-up and preliminary operation of the 60 kV, 100 L plasma immersion ion implantation (PI/sup 3/) system for material processing.
Keywords :
plasma immersion ion implantation; plasma materials processing; 60 kV; material processing; plasma immersion ion implantation; preliminary operation; Atomic measurements; Etching; Ion implantation; Plasma applications; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Plasma temperature; Pulse transformers;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1229943
