DocumentCode

2038253

Title

Advances In Materials Micro Processing Using Excimer Lasers

Author

Sercel, J.P.

Author_Institution

Resonetics, Inc.

fYear

1992

fDate

16-19 Nov 1992

Firstpage

550

Lastpage

551

Keywords

Chemical lasers; Costs; Gas lasers; Laser applications; Laser beams; Laser theory; Optical materials; Optical pulses; Optical resonators; Power lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting

Print_ISBN

0-7803-0526-4

Type

conf

DOI

10.1109/LEOS.1992.694088

Filename

694088