Analysis and experimental study of grooves in ruling process of grating

Due to the ruling process of grating is still dependent on operator experience, and the process model is time-consuming, inefficient, poor quality, unable to pre-control groove and so on. For the forming process of grating groove with mechanically ruling, to describe the speed and pitch angle as the intermediary, converting the ruling process equivalent to extrusion process and transforming the three-dimensional strain problem into a problem of plane strain. Applying the theory of slip line field to establish the rigid-plastic model of a single groove forming, and solving the groove ridge height with the numerical solution. Measuring and calculating elastic modulus, the coefficient of friction of the aluminum film by scratch test and nano-indentation test, reverse solving aluminum film function of stress-strain combined with plastic dimensionless, to simulate the groove combined with the finite element method. Through the description of the actual grating experiment, verifying the accuracy of the theoretical model, and the error analysis was carried out according to the theoretical model, simulation model, scratching tests of three kinds of groove, finally the control Strategy of groove was proposed.