Title :
Transition from electrostatic to electromagnetic mode in atmospheric pressure RF Ar inductively coupled plasma
Author :
Razzak, M.A. ; Kondo, K. ; Uesugi, Yoshihiko ; Takamura, S.
Author_Institution :
Graduate Sch. of Eng., Nagoya Univ., Japan
Abstract :
Summary form only given, as follows. In this paper, the dynamics of E-H discharge mode transition of Ar ICP in atmospheric pressure with a driving frequency range of 0.5/spl sim/1.5 MHz and a moderate rf power of about 2/spl sim/5 kW are investigated experimentally. The transition parameters are calculated by using a proposed model, and the calculated results are compared with that of the experimental results.
Keywords :
argon; discharges (electric); plasma materials processing; plasma sources; 0.5 to 1.5 MHz; Ar; RF inductively coupled plasma; absorbed power; atmospheric pressure; azimuthal discharges; electromagnetic discharge modes; electrostatic discharge modes; electrostatic electromagnetic mode transition; induced electric field; multiple discharge paths; plasma heating; plasma loading impedance; ring-shaped discharges; steady state plasmas; streamer-like discharges; transition parameters; Argon; Atmospheric-pressure plasmas; Electromagnetic coupling; Electromagnetic induction; Electrostatics; Plasma applications; Plasma materials processing; Plasma properties; Radio frequency; Thermal spraying;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1230027
