Simulations of capacitively coupled single- and dual-frequency RF discharges

Summary form only given, as follows. For this study, we have used a two-dimensional fluid code and a modified one-dimensional electrostatic code XPDC1. The particle simulation has the advantage of being a self-consistent and fully kinetic method, yielding important information on the electron and the ion energy and angle distributions. For the highly collisional argon discharges with symmetric and asymmetric configurations, we have used parallel computer clusters for comparison with experimental measurements of electron temperature, power consumption, density, self-bias voltage, and plasma potential.