Title :
Novel optical probing system with submicron spatial resolution for internal diagnosis of VLSI circuits
Author :
Ozaki, K. ; Sekiguchi, H. ; Wakana, S. ; Goto, Y. ; Umehara, Y. ; Matsumoto, J.
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
In this paper, we introduce a novel optical probing system for the internal diagnosis of VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-μm spatial resolution by utilizing the scanning force microscopy technique. The optical sampling pulse width was 30 ps, and the minimum detectable voltage was as small as 10 mV. In an atmospheric environment this system can measure internal signal waveforms of VLSI circuits much faster than electron-beam testers
Keywords :
CMOS integrated circuits; SRAM chips; VLSI; atomic force microscopy; electro-optical devices; integrated circuit testing; 10 mV; 30 ps; VLSI circuits; atmospheric environment; electro-optic sampling; internal diagnosis; internal signal waveforms; minimum detectable voltage; optical probing; probe head configuration; scanning force microscopy; sub-μm spatial resolution; submicron spatial resolution; system stability; waveform acquisition; Atmospheric measurements; Atmospheric waves; Circuit testing; Microscopy; Optical pulses; Sampling methods; Space vector pulse width modulation; Spatial resolution; Very large scale integration; Voltage;
Conference_Titel :
Test Conference, 1996. Proceedings., International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-3541-4
DOI :
10.1109/TEST.1996.556971
