Title :
KrF Laser Surface Treatment of CNT Cathodes with and without Reactive Ion Etching
Author :
Ohsumi, K. ; Honda, T. ; Kim, W.S. ; Oh, C.B. ; Murakami, K. ; Abo, S. ; Wakaya, F. ; Takai, M.
Author_Institution :
Center for Quantum Sci. & Technol. under Extreme Conditions, Osaka Univ.
Abstract :
Carbon nanotube (CNT) cathodes were irradiated by KrF excimer laser. The electron emission properties of the CNT cathode with or without reactive ion etching is examined
Keywords :
carbon nanotubes; cathodes; electron field emission; laser materials processing; sputter etching; C; carbon nanotube cathodes; electron emission; excimer laser; laser irradiation; laser surface treatment; reactive ion etching; Cathodes; Current density; Digital cameras; Etching; Insulation; Laser beams; Laser theory; Power lasers; Surface emitting lasers; Surface treatment;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335358
