DocumentCode
2040845
Title
Fine pitch wire bonding development using a new multipurpose, multi-pad pitch test die
Author
Shu, Bill
Author_Institution
VLSI Technol. Inc., San Jose, CA, USA
fYear
1991
fDate
11-16 May 1991
Firstpage
511
Lastpage
518
Abstract
A multipurpose, multipad pitch test die with pad pitches ranging from 5 mil down to 3 mil, suitable for evaluating gold-ball bonding, aluminum wedge bonding, tape automated bonding (TAB), array bonding, wafer probes, and molding operations has been designed and manufactured. The author reviews the design features of this multipurpose, multipad pitch test die, and presents the statistical design of experiment strategy taken in developing a wire bond process for very-fine-pitch assembly based on this test die. The effect of major bonding parameters on bond ball size and ball shear force is discussed. A statistical method for predicting the ball shorting rate is compared with actual assembly yield data. The experimental results show that using a K&S 1484 bonder with a bottleneck capillary and 1.3-mil-diameter gold wire bonding down to 4.5-mil pad pitch has reasonably good yields. The projected ball shorting rate for 4.5-mil pad pitch is 0.02% for a 128-pad device, or 0.03% for a 160-pad or 208-pad device. The projected ball shorting rate for a 4.3-mil pad pitch die with 128 pads is 0.39%
Keywords
lead bonding; 1.3 mil; 5 to 3 mil; Al wedge bonding; Au ball bonding; Au wire; TAB; array bonding; assembly yield data; ball shear force; ball shorting rate; bond ball size; bonding parameters; bottleneck capillary; design features; experimental results; fine pitch wire bonding; molding operations; multi-pad pitch test die; multipad pitch test die; statistical design of experiment; tape automated bonding; test chip; very-fine-pitch assembly; wafer probes; wire bond process; Aluminum; Assembly; Automatic testing; Bonding forces; Gold; Manufacturing automation; Probes; Statistical analysis; Wafer bonding; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1991. Proceedings., 41st
Conference_Location
Atlanta, GA
Print_ISBN
0-7803-0012-2
Type
conf
DOI
10.1109/ECTC.1991.163925
Filename
163925
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