DocumentCode :
2041006
Title :
Stress relaxation mechanisms in mismatched epitaxial growth of HgCdTe
Author :
Sewell, R. ; Dell, J.M. ; Musca, C.A. ; Faraone, L.
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Western Australia, Perth, WA, Australia
fYear :
2000
fDate :
2000
Firstpage :
97
Lastpage :
100
Abstract :
Stress relieving dislocations at heterojunctions are thought to introduce excess noise in Hg(1-x)Cd(x)Te infrared detectors. An understanding of dislocation formation in this material is useful in optimising device architectures, particularly on non-lattice matched substrates. A [211] Hg(1-x)Cd(x)Te/CdTe/Si epitaxial layer was grown by molecular beam epitaxy (MBE) and is investigated by asymmetric double crystal X-ray diffraction (DCXRD). Rocking curves are interpreted to give the lattice plane spacing and tilt of the epitaxial layer, both perpendicular to and in the plane of the interface. A quantitative model for strain relaxation is applied to the [211] HgCdTe system, so that the critical thickness at which edge dislocations form may be calculated. Interpretation of X-ray rocking curves show the strained layer to be partially relaxed, as would be expected from the critical thickness model.
Keywords :
II-VI semiconductors; X-ray diffraction; cadmium compounds; edge dislocations; infrared detectors; mercury compounds; molecular beam epitaxial growth; semiconductor device models; semiconductor epitaxial layers; semiconductor growth; semiconductor heterojunctions; stress relaxation; CdTe; Hg(1-x)Cd(x)Te-CdTe-Si; MBE; X-ray diffraction; X-ray rocking curves; [211] Hg(1-x)Cd(x)Te/CdTe/Si; asymmetric double crystal XRD; critical thickness; device architecture; dislocation formation; edge dislocations; epitaxial layer tilt; excess noise; heterojunctions; infrared detectors; lattice plane spacing; mismatched epitaxial growth; molecular beam epitaxy; non-lattice matched substrates; quantitative model; strain relaxation; stress relaxation mechanisms; stress relieving dislocations; Crystalline materials; Epitaxial growth; Epitaxial layers; Heterojunctions; Infrared detectors; Mercury (metals); Molecular beam epitaxial growth; Stress; Substrates; Tellurium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN :
0-7803-6698-0
Type :
conf
DOI :
10.1109/COMMAD.2000.1022900
Filename :
1022900
Link To Document :
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