Atom Probe Specimen Fabrication Methods using a Dual FIB/SEM

The authors have developed novel methods for specimen preparation using a dual beam FIB, including site-specific techniques and lift-out methods aimed at material and device applications. One such method is the thin wedge method where most of the bulk material around a region of interest is removed and allows the remainder of the preparation to be carried out using a FIB. A second method involves the lift-out of a long post, which is then attached to a suitable mount and sharpened to form an atom probe specimen. This method is employed using the expertise gained from ex-situ lift-out of TEM specimens or using an in-situ micromanipulator. Another technique applicable to site-specific analysis uses a conventional electropolished specimen as a blank. Features of interest such as precipitates or grain boundaries are located by imaging with the ion beam and then, subsequently, the electron beam