A layered structure surface acoustic wave for oxygen sensing

Author

Kalantar-zadeh, K. ; Li, Y.X. ; Wlodarski, W. ; Brennan, F.

Author_Institution

Sch. of Electr. & Comput. Syst. Eng., RMIT Univ., Melbourne, Vic., Australia

fYear

2000

fDate

2000

Firstpage

202

Lastpage

205

Abstract

A novel layered structure surface acoustic wave (layered SAW) transducer has been employed for an oxygen sensing application. It is a SiO₂(0.36 μm)/ST-cut quartz crystal transducer. The dominant mode propagating in the transducer is a combination of Rayleigh and Love modes. Such a structure has the advantage of confining the acoustic wave energy to the top selective layer, which increases the sensitivity of the device. A TiO₂ thin film deposited by the sol-gel process has been used as the oxygen sensitive layer.

Keywords

Love waves; Rayleigh waves; gas sensors; nanostructured materials; oxygen; quartz; silicon compounds; surface acoustic wave sensors; surface acoustic wave transducers; titanium compounds; 0.36 micron; Love mode; Rayleigh mode; SiO₂; SiO₂-TiO₂; SiO₂/ST-cut quartz crystal transducer; device sensitivity; layered SAW transducer; layered structure surface acoustic wave; nanostructured TiO₂ thin film; oxygen sensing; sol-gel process; Acoustic sensors; Acoustic transducers; Acoustic waves; Boundary conditions; Delay lines; Gas detectors; Oscillators; Oxygen; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on

Print_ISBN

0-7803-6698-0

Type

conf

DOI

10.1109/COMMAD.2000.1022927

Filename

1022927