DocumentCode :
2041779
Title :
Suppression of mechanical coupling for parallel beam gyroscope
Author :
Sato, Hiroshi ; Fukuda, Toshio ; Arai, Fumihito ; Itoigawa, Kouichi ; Tsukahara, Yasuhisa
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Volume :
4
fYear :
2000
fDate :
2000
Firstpage :
3939
Abstract :
A parallel beam structure has many significant features, as follows. (i) The tip moves in parallel at the end. (ii) This structure converts a small displacement into a concentrated large strain. (iii) Each unit doesn´t interfere with the other units by piling up structures. (iv) The lateral rigidity is high. We propose this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In this paper is shown the method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close together. Then we propose the suppression method of the mechanical coupling that arises by bringing two resonance frequencies close. From this result, this structure suits for the gyroscope. Experimental results are shown
Keywords :
angular velocity measurement; gyroscopes; piezoelectric transducers; resonance; angular rate sensor; drive resonance frequency; lateral rigidity; mechanical coupling suppression; parallel beam gyroscope; parallel tip motion; piezoelectric vibrating gyroscope; sensing resonance frequency; Capacitive sensors; Costs; Force sensors; Gyroscopes; Optical coupling; Piezoelectric effect; Resonance; Resonant frequency; Robotics and automation; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on
Conference_Location :
San Francisco, CA
ISSN :
1050-4729
Print_ISBN :
0-7803-5886-4
Type :
conf
DOI :
10.1109/ROBOT.2000.845345
Filename :
845345
Link To Document :
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