Fabrication and Characteristics of Novel Graphite Field-Emitters for Application to Electron-Beam Pumped Light Sources

Light emission based on the excitation of rare gases by a low energy dc electron beam is a promising approach for realizing deep- or vacuum-ultraviolet light sources or lasers that are compact and have high efficiency. Carbon nanotube (CNT) field emitters have been used as electron sources in replacement of thermal cathodes to construct a low energy-consumption, compact and low-cost system. However, CNT technologies experience problems relating to the adherence of the interface between the carbon layers and their substrate. To try to solve the problem, carbon nanoneedle field-emitters were fabricated by etching a graphite substrate with H₂ gas using radio frequency (RF) magnetron sputtering equipment. Scanning electron microscopy, energy-dispersive X-ray fluorescence spectroscopy, and electron emission measurements were performed for the characterization of graphite field-emitters