Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources

Author

Ptitsin, V.E. ; Tregubov, V.F.

Author_Institution

Inst. for Anal. Instrum., Russian Acad. of Sci., St. Petersburg

fYear

2006

fDate

38899

Firstpage

193

Lastpage

194

Abstract

The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes

Keywords

Schottky barriers; cathodes; electro-optical devices; electron probes; field emission electron microscopy; tungsten; zirconium compounds; Schottky cathodes; TAU software package; ZrO-W; bright thermal field electron sources; electro optical characteristics; electron emission; electron microscopy; electrostatic field potential distribution; lithography; numerical modeling; surface field strength; Brightness; Cathodes; Earth Observing System; Electron beams; Electron emission; Electron sources; Instruments; Numerical models; Probes; Vacuum breakdown;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Conference_Location

Guilin

Print_ISBN

1-4244-0401-0

Type

conf

DOI

10.1109/IVNC.2006.335424

Filename

4134526