Title :
Numerical Modeling of Electron-Optical Characteristics of Thermal Field Electron Sources
Author :
Ptitsin, V.E. ; Tregubov, V.F.
Author_Institution :
Inst. for Anal. Instrum., Russian Acad. of Sci., St. Petersburg
Abstract :
The emissive and electro-optical characteristics of ZrO/W Schottky cathodes used as bright thermal field electron sources for electron microscopy and lithography instruments are theoretically studied. The models using TAU software package is in good quantitative agreement with experimental data for electrostatic field potential distribution and surface field strength for conventional cathodes
Keywords :
Schottky barriers; cathodes; electro-optical devices; electron probes; field emission electron microscopy; tungsten; zirconium compounds; Schottky cathodes; TAU software package; ZrO-W; bright thermal field electron sources; electro optical characteristics; electron emission; electron microscopy; electrostatic field potential distribution; lithography; numerical modeling; surface field strength; Brightness; Cathodes; Earth Observing System; Electron beams; Electron emission; Electron sources; Instruments; Numerical models; Probes; Vacuum breakdown;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335424
