Title :
Sol-gel prepared silica-based materials for sensors and optoelectronic applications
Author :
Toan, Nguyen Nhu ; Tuan, Mai Anh ; Huong, Tran Thu ; Huong, Nguyen Thanh ; Bathou, Charles ; Anh, Tran Kim ; Minh, Le Quoc ; Chien, Nguyen Duc
Author_Institution :
Int. Training Inst. for Mater. Sci. (ITIMS), Hanoi, Vietnam
Abstract :
This paper reviews our investigation results on silica-based materials prepared by sol-gel method and their applications. Spin-on glass (SOG) materials (undoped or doped with boron and phosphorus) were prepared and optimized. They were applied to the realization of MOSFET-based chemical sensors. A new technology was invented for the fabrication of sensors by using SOG diffusion source. Eu3+-doped silica-titania materials with different refractive indices were also prepared for waveguides. Optical and photo-luminescence measurement results are presented and discussed here.
Keywords :
ion sensitive field effect transistors; optical materials; optical waveguides; photoluminescence; refractive index; silicon compounds; sol-gel processing; Eu3+-doped silica-titania material; MOSFET chemical sensor; SOG diffusion source; SiO2; SiO2-TiO2:Eu; SiO2:B; SiO2:P; fabrication technology; optical waveguide; optoelectronic material; photoluminescence; refractive index; silica material; sol-gel synthesis; spin-on-glass material; Boron; Chemical sensors; Chemical technology; Glass; Optical device fabrication; Optical materials; Optical refraction; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN :
0-7803-6698-0
DOI :
10.1109/COMMAD.2000.1022949
