Title :
Phase composition and structure of nanoscaled thermoelectric films on base of CoSb3 skutterudite
Author :
Makogon, Yu.N. ; Albrecht, Martin ; Pavlova, Elmira P. ; Sidorenko, S.I. ; Daniel, Morris ; Shkarban, P.A. ; Figurna, O.V.
Author_Institution :
Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine
Abstract :
The processes of skutterudite CoSb3 formation in nanoscaled CoSbx(30 nm) (1.8<;x<;4.2) films deposited on SiO2(100 nm)/Si(001) substrate were investigated by methods of physical materials science. After deposition the films are in x-ray amorphous state. Amorphous films crystallization occurs during annealing in temperature range of 140°C-200°C. Phase composition of nanoscaled films corresponds to Co-Sb phase diagram. At annealing higher 400°C Sb sublimation occurs and amount of CoSb2 phase increases. More intensive process of Sb sublimation is observed at annealing of x-ray amorphous films.
Keywords :
X-ray diffraction; amorphous semiconductors; annealing; crystallisation; liquid phase deposition; nanofabrication; nanostructured materials; phase diagrams; semiconductor growth; semiconductor thin films; skutterudites; sublimation; thermoelectricity; CoSb3; amorphous films crystallization; nanoscaled films phase composition; nanoscaled thermoelectric film structure; physical materials science method; skutterudite formation process; temperature 140 degC to 200 degC; temperature 400 degC; x-ray amorphous films; x-ray amorphous state; Annealing; Crystallization; Educational institutions; Electronic mail; Films; Nanoscale devices; Physics;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-395-1
