Title :
Electrical resistivity and GHz permeability of (CoFeB)-(SiO/sub 1.9/) hetero-amorphous granular films
Author :
Munakata, M. ; Namikawa, M. ; Motoyama, M. ; Yagi, M. ; Shimada, Y. ; Yabukami, S. ; Yamaguchi, M. ; Arai, K.I.
Author_Institution :
Sojo Univ., Kumamoto, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we present experimental evidences about the very large critical thickness of our films that makes eddy current loss practically negligible in GHz range.
Keywords :
amorphous magnetic materials; boron alloys; cobalt alloys; eddy current losses; electrical resistivity; ferromagnetic materials; granular materials; iron alloys; magnetic permeability; magnetic thin films; silicon compounds; CoFeB-SiO/sub 1.9/; CoFeB-SiO/sub 1.9/ hetero-amorphous granular films; GHz permeability; eddy current loss; electrical resistivity; Conductivity; Eddy currents; Electric resistance; Frequency; Magnetic cores; Magnetic field measurement; Magnetic films; Permeability; Sputtering; Thin film inductors;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230314
