DocumentCode
2042772
Title
The thermal performance of PCR chip with copper target ion beam sputtering deposition on the ceramic peltier
Author
Kuiwei Qin ; Qiaorui Xing ; Xuefei Lv ; Di Zhou ; Rui Li ; Yulin Deng
Author_Institution
Sch. of life Sci., Beijing Inst. of Technol., Beijing, China
fYear
2015
fDate
2-5 Aug. 2015
Firstpage
1054
Lastpage
1059
Abstract
In this study, the copper target ion beam sputtering deposition (CTIBSD) method was used for improving the thermal performance of commercial ceramic peltier and several PCR chips were made of NOA81 in few minutes by UV soft lithography technology. The thermal uniformity and heat transfer rate were simulated by Comsol to investigate the improved effect of coppering peltier. In addition, the thermal distribution on the peltiers with different thickness copper film were measured through the line average temperature measuring method. The cooling rate of the PCR chip with coppering Peltier also was tested according to the PCR program. The results of the simulation and measurement showed that the CTIBSD method could greatly improve the thermal performance of Peltier and the PCR time of the PCR chip could be reduced by the increasing of the heat transfer rate. An practical application in gene amplification was realized successfully on the PCR chip which the heat resource supporting by the coppering Peltier. With the excellent thermal performance of coppering Peltier, the novel NOA81 chip could apply in field of POCT (Point of care testing) and forensic analysis in the future.
Keywords
Peltier effect; cooling; ion beam assisted deposition; lab-on-a-chip; sputter deposition; thermocouples; NOA81 chip; PCR chip; ceramic peltier; cooling rate; copper target ion beam sputtering deposition; forensic analysis; gene amplification; heat transfer rate; point of care testing; thermal performance; thermal uniformity; Ceramics; Cooling; Copper; Films; Heating; Sputtering; Temperature measurement; Comsol simulation; Copper target sputtering; PCR chip; Peltier;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation (ICMA), 2015 IEEE International Conference on
Conference_Location
Beijing
Print_ISBN
978-1-4799-7097-1
Type
conf
DOI
10.1109/ICMA.2015.7237631
Filename
7237631
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