Title :
A ZnO/SiO2/Si[100] Love mode transducer
Author :
Zadeh, K. Kalantar ; Wlodarski, W. ; Holland, A. ; Reeves, G.
Author_Institution :
Sch. of Electr. & Comput. Syst. Eng., RMT Univ., Melbourne, Vic., Australia
Abstract :
ZnO/SiO2/Si[100] Love mode transducers were fabricated. SiO2 films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO2 films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay line was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz.
Keywords :
II-VI semiconductors; Love waves; acoustic wave propagation; piezoelectric semiconductors; scanning electron microscopy; silicon; silicon compounds; sputtered coatings; surface acoustic wave transducers; surface acoustic waves; zinc compounds; 85 MHz; SAW Love mode delay line; SEM; Si; SiO2 film; ZnO films; ZnO-SiO2-Si; ZnO/SiO2/Si[100] Love mode transducer; acoustic response; electron beam evaporation; magnetron sputtering; untuned conditions; Crystallization; Electron beams; Gold; Piezoelectric films; Scanning electron microscopy; Sputtering; Substrates; Temperature; Transducers; Zinc oxide;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN :
0-7803-6698-0
DOI :
10.1109/COMMAD.2000.1022966
