DocumentCode
2042773
Title
A ZnO/SiO2/Si[100] Love mode transducer
Author
Zadeh, K. Kalantar ; Wlodarski, W. ; Holland, A. ; Reeves, G.
Author_Institution
Sch. of Electr. & Comput. Syst. Eng., RMT Univ., Melbourne, Vic., Australia
fYear
2000
fDate
2000
Firstpage
367
Lastpage
370
Abstract
ZnO/SiO2/Si[100] Love mode transducers were fabricated. SiO2 films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO2 films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay line was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz.
Keywords
II-VI semiconductors; Love waves; acoustic wave propagation; piezoelectric semiconductors; scanning electron microscopy; silicon; silicon compounds; sputtered coatings; surface acoustic wave transducers; surface acoustic waves; zinc compounds; 85 MHz; SAW Love mode delay line; SEM; Si; SiO2 film; ZnO films; ZnO-SiO2-Si; ZnO/SiO2/Si[100] Love mode transducer; acoustic response; electron beam evaporation; magnetron sputtering; untuned conditions; Crystallization; Electron beams; Gold; Piezoelectric films; Scanning electron microscopy; Sputtering; Substrates; Temperature; Transducers; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Print_ISBN
0-7803-6698-0
Type
conf
DOI
10.1109/COMMAD.2000.1022966
Filename
1022966
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