Sol-gel synthesis of strontium titanate thin films and perspectives of their application in production of memristors

Author

Gaponenko, N.V. ; Rudenko, M.V. ; Anaraki, H. Sohrabi ; Zavadski, S.M. ; Golosov, D.A. ; Kolosnitsin, B.S. ; Kolos, V.V. ; Pyatlitski, A.N. ; Turtsevich, A.S. ; Troyanchuk, I.O.

Author_Institution

Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus

fYear

2013

fDate

8-14 Sept. 2013

Firstpage

828

Lastpage

829

Abstract

The strontium titanate thin films were fabricated on silicon using the sol-gel method. The strontium titanate phase was registered with X-ray diffraction analysis. The films were deposited by spin-on technique and the film thickness was in the range of 90-115 nm. The perspectives for development of the sol-gel method for the formation of memristors as well as varistors and capacitors on the basis of SrTiO₃ xerogels are discussed.

Keywords

X-ray diffraction; dielectric thin films; elemental semiconductors; memristors; silicon; sol-gel processing; strontium compounds; Si; SrTiO₃; X-ray diffraction analysis; capacitors; memristors; silicon; size 90 nm to 115 nm; sol-gel synthesis; spin-on technique; strontium titanate phase; strontium titanate thin films; varistors; xerogels; Annealing; Films; Memristors; Silicon; Solids; Strontium; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference

Conference_Location

Sevastopol

Print_ISBN

978-966-335-395-1

Type

conf

Filename

6653082