DocumentCode
2042989
Title
Defects density distribution of AIN films produced by RF sputtering in argon-nitrogen-hydrogen mixture
Author
Ligatchev, V. ; Yoon, S.F. ; Ahn, J. ; Zhang, Q. ; Rusli
Author_Institution
Nanyang Technological University
fYear
2000
fDate
6-8 Dec. 2000
Firstpage
387
Lastpage
390
Keywords
Conductivity; Deconvolution; Molecular beam epitaxial growth; Optical films; Radio frequency; Silicon; Sputtering; Substrates; Temperature; US Department of Defense;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on
Conference_Location
Bundoora, Victoria, Australia
Print_ISBN
0-7803-6698-0
Type
conf
DOI
10.1109/COMMAD.2000.1022971
Filename
1022971
Link To Document