Title :
Investigation of multilayer nanostructured TiN/MoN coatings with different thicknesses of monolayers and their formation using C-PVD
Author :
Bondar, O.V. ; Andreyev, A.A. ; Postolnyi, B.A. ; Abadias, G. ; Beresnev, V.M. ; Sobol, O.V.
Author_Institution :
Sumy State Univ., Sumy, Ukraine
Abstract :
Multilayer coatings based on TiN/MoN with different monolayers thickness have been obtained by using C-PVD method. XRD, SEM, EDX, HRTEM and AFM analyzes of coatings have been carried out. Specific relationship between the layers thicknesses, substrate potential, the annealing process, physical and mechanical properties of samples have been revealed.
Keywords :
X-ray chemical analysis; annealing; atomic force microscopy; coatings; molybdenum compounds; multilayers; nanofabrication; nanostructured materials; scanning electron microscopy; titanium compounds; transmission electron microscopy; vapour deposition; AFM; C-PVD; EDX; HRTEM; SEM; TiN-MoN; XRD; annealing; mechanical properties; monolayers; multilayer nanostructured coatings; physical properties; Coatings; Educational institutions; Electronic mail; Nonhomogeneous media; Substrates; Tin; X-ray scattering;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2013 23rd International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-395-1
