Title :
Effect of lattice strain on soft magnetic properties in FeCo/NiFe(Cr) thin films with 2.4 T
Author :
Shimatsu, T. ; Katada, H. ; Muraoka, H. ; Nakamura, Y.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, soft magnetism of FeCo/NiFe(Cr) films is discussed relating to lattice strain of the FeCo layer. Films were deposited by ultra high vacuum (UHV) dc magnetron sputtering onto glass substrates (Corning 7059). Ta films of 5 nm thickness was used as seed and protective layers, respectively. Fe-25%Co and Fe-30%Co alloy targets were subjected to the study. Ni/sub 79/Fe/sub 21/ or (Ni/sub 79/Fe/sub 21/)/sub 73/Cr/sub 27/targets were used for the deposition of NiFe or NiFeCr layers.
Keywords :
chromium alloys; cobalt alloys; ferromagnetic materials; internal stresses; iron alloys; magnetic epitaxial layers; magnetisation; magnetoelastic effects; nickel alloys; soft magnetic materials; sputter deposition; 2.4 T; 5 nm; FeCo-NiFeCr; FeCo/NiFe(Cr) thin films; Ta films; UHV; glass substrates; lattice strain; protective layer; seed layers; soft magnetic properties; ultra high vacuum dc magnetron sputtering; Chromium; Glass; Iron; Lattices; Magnetic field induced strain; Magnetic films; Magnetic properties; Protection; Soft magnetic materials; Sputtering;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230343
