DocumentCode
2043861
Title
Low Temperature Growth of Carbon Nanotubes by Alcohol Catalytic CVD for Field Emitter Applications
Author
Sato, Hideki ; Hata, Koichi ; Hiasa, Ken ; Saito, Yahachi
Author_Institution
Graduate Sch. of Eng., Mie Univ., Tsu
fYear
2006
fDate
38899
Firstpage
335
Lastpage
336
Abstract
The growth characteristics, such as temperature and pressure dependence, of carbon nanotubes (CNTs) by alcohol catalytic CVD (ACCVD) were studied. The thickness of the CNT layer is examined using scanning electron microscopy It was confirmed that the growth temperature could be lowered to as low as 400degC. This result indicates that the ACCVD technique is suitable for the low temperature CNT-FEA fabrication
Keywords
carbon nanotubes; chemical vapour deposition; electron field emission; scanning electron microscopy; C; alcohol catalytic CVD; carbon nanotubes; field emitter applications; low temperature growth; scanning electron microscopy; Capacitance; Carbon nanotubes; Ethanol; Fabrication; Inductors; Scanning electron microscopy; Substrates; Temperature dependence; Temperature distribution; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location
Guilin
Print_ISBN
1-4244-0401-0
Type
conf
DOI
10.1109/IVNC.2006.335495
Filename
4134597
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