Title :
Low Temperature Growth of Carbon Nanotubes by Alcohol Catalytic CVD for Field Emitter Applications
Author :
Sato, Hideki ; Hata, Koichi ; Hiasa, Ken ; Saito, Yahachi
Author_Institution :
Graduate Sch. of Eng., Mie Univ., Tsu
Abstract :
The growth characteristics, such as temperature and pressure dependence, of carbon nanotubes (CNTs) by alcohol catalytic CVD (ACCVD) were studied. The thickness of the CNT layer is examined using scanning electron microscopy It was confirmed that the growth temperature could be lowered to as low as 400degC. This result indicates that the ACCVD technique is suitable for the low temperature CNT-FEA fabrication
Keywords :
carbon nanotubes; chemical vapour deposition; electron field emission; scanning electron microscopy; C; alcohol catalytic CVD; carbon nanotubes; field emitter applications; low temperature growth; scanning electron microscopy; Capacitance; Carbon nanotubes; Ethanol; Fabrication; Inductors; Scanning electron microscopy; Substrates; Temperature dependence; Temperature distribution; Transmission electron microscopy;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335495
