Title :
Magnet arrays for use in a 3-D MEMS mirror array for optical switching
Author :
Bernstein, J. ; Taylor, W.P. ; Brazzle, J.D. ; Corcoran, C.J.
Author_Institution :
Corning IntelliSense, Wilmington, DE, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we present magnet array development as part of 3D electromagnetic MEMS mirror arrays for use in optical switching applications. An electromagnetic mirror array uses an external array of magnets positioned under the array of mirrors to provide a strong magnetic field at the mirrors. Each mirror contains multiple coils which interact with the external magnetic fields to produce two orthogonal torques.
Keywords :
coils; magnetic fields; magnetic mirrors; micromechanical devices; micromirrors; optical switches; 3D electromagnetic MEMS mirror arrays; MEMS mirror array; magnet arrays; magnetic field; multiple coils; optical switching; orthogonal torques; Coils; Density measurement; Magnetic field measurement; Magnetic fields; Magnetic flux; Magnetic flux density; Magnetic switching; Micromechanical devices; Mirrors; Optical arrays;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230362
