Title :
XPS and LEED Analyses on Zirconium Oxide Modified (100) Surface of Molybdenum
Author :
Kawakubo, T. ; Nakane, H. ; Adachi, H.
Author_Institution :
Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Hokkaido
Abstract :
It has been found that the work function of Mo(100) surface is able to reduce to 2.1 eV by heating it with a slight layer of zirconium oxide in a vacuum condition. Here the low work function surface, which is abbreviated to ZrO/Mo(100), was examined aiming to understand the reducing mechanism of the work function. Low-energy electron diffraction (LEED) is employed to analyze atomic arrangement at the surface, and X-ray photoelectron spectroscopy (XPS) to identify the surface chemical condition. The experiment gives almost the same results as for the ZrO/W(100) low work function surface
Keywords :
X-ray photoelectron spectra; low energy electron diffraction; molybdenum; work function; zirconium compounds; LEED; Mo(100) surface; X-ray photoelectron spectroscopy; XPS; ZrO-Mo; atomic arrangement; heating; low-energy electron diffraction; surface chemical condition; work function; Atomic layer deposition; Chemical analysis; Crystalline materials; Heat engines; Heating; Inorganic materials; Temperature; Tungsten; Vacuum technology; Zirconium;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335229
