XPS and LEED Analyses on Zirconium Oxide Modified (100) Surface of Molybdenum

Author

Kawakubo, T. ; Nakane, H. ; Adachi, H.

Author_Institution

Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Hokkaido

fYear

2006

fDate

38899

Firstpage

385

Lastpage

386

Abstract

It has been found that the work function of Mo(100) surface is able to reduce to 2.1 eV by heating it with a slight layer of zirconium oxide in a vacuum condition. Here the low work function surface, which is abbreviated to ZrO/Mo(100), was examined aiming to understand the reducing mechanism of the work function. Low-energy electron diffraction (LEED) is employed to analyze atomic arrangement at the surface, and X-ray photoelectron spectroscopy (XPS) to identify the surface chemical condition. The experiment gives almost the same results as for the ZrO/W(100) low work function surface

Keywords

X-ray photoelectron spectra; low energy electron diffraction; molybdenum; work function; zirconium compounds; LEED; Mo(100) surface; X-ray photoelectron spectroscopy; XPS; ZrO-Mo; atomic arrangement; heating; low-energy electron diffraction; surface chemical condition; work function; Atomic layer deposition; Chemical analysis; Crystalline materials; Heat engines; Heating; Inorganic materials; Temperature; Tungsten; Vacuum technology; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Conference_Location

Guilin

Print_ISBN

1-4244-0401-0

Type

conf

DOI

10.1109/IVNC.2006.335229

Filename

4134621