• DocumentCode
    2045012
  • Title

    Development of Compact SEM Equipped with Carbon Nanotube Field Emission Cathode

  • Author

    Yabushita, Ryosuke ; Hata, Koichi ; Sato, Hideki ; Saito, Yahachi

  • Author_Institution
    Graduate Sch. of Eng., Mie Univ., Tsu
  • fYear
    2006
  • fDate
    38899
  • Firstpage
    427
  • Lastpage
    428
  • Abstract
    This article presents a preliminary results on the development of a compact FE-SEM equipped with a multiwall carbon nanotube field emission cathode, a Butler electrostatic lens as a condenser lens and an objective lens made of a permanent magnet. The instrument was tested on a Cu 200 mesh with 25 mum line width
  • Keywords
    carbon nanotubes; cathodes; copper; electrostatic lenses; field emission electron microscopy; scanning electron microscopy; Butler electrostatic lens; C; Cu; compact SEM; condenser lens; field emission SEM; multiwall carbon nanotube field emission cathode; objective lens; permanent magnet; Carbon dioxide; Carbon nanotubes; Cathodes; Electrodes; Electron beams; Focusing; Iron; Lenses; Organic materials; Permanent magnets;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
  • Conference_Location
    Guilin
  • Print_ISBN
    1-4244-0401-0
  • Type

    conf

  • DOI
    10.1109/IVNC.2006.335250
  • Filename
    4134642
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2045012