The Development of an Ultra-Precision Motion Control System Based on a Master-Slave Mode

In this paper, a new master-slave motion control system based on air bearing is presented to meet the demand for nanometer level accuracy. A master-slave control system is constructed with a linear motor and a Lorentz motor, which is applied to an ultra-precision dual-stage. By adopting the air bearing, both linear motor and Lorentz motor are regarded as a double differential system respectively. According to the structure of the stage, there is no mechanical connection between the two kinds of motors. That solves the coupling problems which exist in conventional dual-stages. The ´PID+feedforward´ control structure is adopted. The motion equations of master and slave system are deduced. High position accuracy of nanometer degree and high moving velocity are achieved. The MATLAB simulation and actual experimental results are provided.