Abstract :
Summary form only given. Field evaporation (FEV) is the ion emission process in two important tools of nanotechnology, the focused ion beam (FIB) machine and the atom-probe field-ion microscope. Basic FEV theory is well established, but finer details are not. An important parameter is the field FE at which FEV activation energy becomes zero. FE cannot be measured directly, but must be extracted from experimental data using a model. Reliable estimates exist only for three elements, W, Mo and Rh. Raw data exist for seven other elements, but it can be argued that the methods of analysis previously used are incorrect. This data has been re-analysed using the author´s FEV model. In V/nm the FE-values derived are: Al=37.7, Fe=63.4, Ni=54.7, Cu=52.5, Pd=52.5, Ag=41.7, Ir=66.7. These values are systematically higher than best theoretical estimates, by about 40%
Keywords :
aluminium; atom probe field ion microscopy; copper; field evaporation; focused ion beam technology; iridium; iron; molybdenum; nickel; palladium; rhodium; silver; tungsten; Ag; Al; Cu; FIB; Fe; Ir; Mo; Ni; Pd; Rh; W; ZERO-Q evaporation field values; activation energy; atom-probe field-ion microscope; field evaporation; focused ion beam machine; ion emission process; nanotechnology; Atomic beams; Atomic measurements; Data mining; Electron microscopy; Estimation theory; Ion beams; Ion emission; Iron; Nanotechnology;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International