Title :
High Temperature Field Evaporation of Tantalum Emitter
Author :
Golubev, Oleg L. ; N.M., Blashenkov ; Ya., Lavrent´ev G.
Author_Institution :
A.F. Ioffe Phys. Tech. Inst., Russian Acad. of Sci., St. Petersburg
Abstract :
A magnetic atom probe is used to study the high temperature field evaporation of Ta emitters. Varying concentrations of Ta3+ and Ta2+ ions are observed within the 300-2500 K temperature range while Ta+ ions only exist at high temperatures. Increasing temperature leads to reduction of evaporation field intensity causing the decrease in the charges of ions
Keywords :
field evaporation; field ion emission; high-temperature effects; tantalum; 300 to 2500 K; Ta; evaporation field intensity; high temperature field evaporation; ion charge; ion concentrations; magnetic atom probe; tantalum emitter; Atomic measurements; Contracts; Instruments; Iron; Probes; Temperature dependence;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International
Conference_Location :
Guilin
Print_ISBN :
1-4244-0401-0
DOI :
10.1109/IVNC.2006.335360