Title :
A new structuring technique for polymer integrated circuits
Author :
Becker, Eike ; Johannes, Hans-Hermann ; Benstem, Torsten ; Dobbertin, Thomas ; Heithecker, Dirk ; Metzdorf, Dirk ; Neuner, Helge ; Kowalsky, Wolfgang
Author_Institution :
Inst. fur Hochfrequenztech., Technische Univ. Braunschweig, Germany
Abstract :
We present a new technique for structuring polymeric interconnects and drain/source contacts of organic field-effect transistors in polymer integrated circuits. Our method is based on the selective electrochemical polymerisation of conductive polymers (e.g. PEDOT) on electrodes partially covered with a patterned insulating layer and the subsequent transfer of the polymeric structure to a flexible plastic substrate. Lateral resolutions of 10 /spl mu/m have already been obtained. The process is simple, does not require costly techniques like photolithography or vacuum deposition and it has the prospect of being applicable in reel-to-reel industrial processes.
Keywords :
conducting polymers; electrical contacts; electrochemistry; field effect integrated circuits; integrated circuit interconnections; integrated circuit packaging; molecular electronics; organic semiconductors; plastic packaging; polymer films; polymerisation; PEDOT; conductive polymers; flexible plastic substrate; lateral resolutions; organic field-effect transistors; partially covered electrodes; patterned insulating layer; polymer integrated circuits; polymeric drain/source contacts; polymeric interconnects; polymeric structure transfer; reel-to-reel industrial processes; selective electrochemical polymerisation; structuring technique; Anodes; Cathodes; Electrodes; Lithography; OFETs; Plastic insulation; Polymer films; Printing; Sheet materials; Substrates;
Conference_Titel :
Polymers and Adhesives in Microelectronics and Photonics, 2001. First International IEEE Conference on
Conference_Location :
Potsdam, Germany
Print_ISBN :
0-7803-7220-4
DOI :
10.1109/POLYTR.2001.973264