• DocumentCode
    2047147
  • Title

    Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads

  • Author

    Clinton, T.W. ; Zhang, Z.Z. ; Feng, Y.C. ; van der Heijden, P.A.A.

  • Author_Institution
    Seagate Res., Seagate Technol., Pittsburgh, PA, USA
  • fYear
    2003
  • fDate
    March 30 2003-April 3 2003
  • Lastpage
    11
  • Abstract
    In this paper, we focus on head trimming techniques based on a asymmetric trimming process, whereby only one side of a write pole is FIB trimmed to achieve the target width. We use this technique for longitudinal and perpendicular HGA-level head trimming.
  • Keywords
    focused ion beam technology; magnetic heads; focused-ion-beam trimming; head trimming; write heads; Bit error rate; CD recording; Geometry; Magnetic heads; Manufacturing processes; Perpendicular magnetic recording; Solids; Subspace constraints; Testing; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2003. INTERMAG 2003. IEEE International
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7647-1
  • Type

    conf

  • DOI
    10.1109/INTMAG.2003.1230485
  • Filename
    1230485