Title :
Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads
Author :
Clinton, T.W. ; Zhang, Z.Z. ; Feng, Y.C. ; van der Heijden, P.A.A.
Author_Institution :
Seagate Res., Seagate Technol., Pittsburgh, PA, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, we focus on head trimming techniques based on a asymmetric trimming process, whereby only one side of a write pole is FIB trimmed to achieve the target width. We use this technique for longitudinal and perpendicular HGA-level head trimming.
Keywords :
focused ion beam technology; magnetic heads; focused-ion-beam trimming; head trimming; write heads; Bit error rate; CD recording; Geometry; Magnetic heads; Manufacturing processes; Perpendicular magnetic recording; Solids; Subspace constraints; Testing; Throughput;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230485
