DocumentCode
2047286
Title
Creation of design algorithm of working elements of micromechanical gyroscopes
Author
Lobur, Mykhaylo ; Holovatyy, Andriy
Author_Institution
Dept. of CAD Syst., Lviv Polytech. Nat. Univ., Lviv
fYear
2008
fDate
21-24 May 2008
Firstpage
49
Lastpage
52
Abstract
In this paper, the mathematical model of vibrations of the micromechanical gyroscope and the design algorithm of the constructive parameters of its working elements are proposed.
Keywords
gyroscopes; micromechanical devices; vibrations; MEMS design; constructive parameters; micromechanical gyroscopes; tuning fork gyroscope; vibrations; Algorithm design and analysis; Angular velocity; Capacitance; Capacitors; Electrostatics; Equations; Gyroscopes; Mathematical model; Micromechanical devices; Vibrations; MEMS (MicroElectroMechanical Systems); MEMS two-mass tuning fork gyroscope; angular velocity; constructive parameters; design algorithm; inertial sensors; working element;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location
Polyana
Print_ISBN
978-966-2191-00-4
Type
conf
DOI
10.1109/MEMSTECH.2008.4558734
Filename
4558734
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