Title :
Mathematical model of piezoelectric MEMS accelerometer
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv
Abstract :
In this paper mathematical model of the piezoelectric accelerometer based on unimorph cantilever beam 31 direction was considered. Numerical verification of the mathematical model was performed.
Keywords :
accelerometers; beams (structures); cantilevers; mathematical analysis; microsensors; piezoelectric devices; mathematical model; piezoelectric MEMS accelerometer; unimorph cantilever beam; Accelerometers; Capacitive sensors; Electrical resistance measurement; Electrodes; Equations; Mathematical model; Micromechanical devices; Stress; Structural beams; Vibration measurement; MEMS; accelerometer; piezoelectric;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558740
