DocumentCode
2047661
Title
Reliability in MEMS and mechanical fatigue tests on gold micro-structures
Author
Pasquale, G. De ; Soma, A.
Author_Institution
Dept. of Mech., Polytech. of Torino, Torino
fYear
2008
fDate
21-24 May 2008
Firstpage
91
Lastpage
93
Abstract
The mechanical fatigue behavior of MEMS gold structures is analyzed. Preliminary numerical FEM simulations are performed to determine the tension level in the material for a certain actuation voltage. Experimental tests are performed in order to monitor the damage accumulation during loading cycles; fatigue effect on material is evaluated through the monitoring of the pull-in voltage of the device.
Keywords
fatigue testing; finite element analysis; gold; micromechanical devices; reliability; Au; FEM simulations; MEMS gold structures; MEMS reliability; actuation voltage; damage accumulation; gold micro-structures; loading cycles; mechanical fatigue tests; pull-in voltage; Fatigue; Gold; Materials reliability; Materials testing; Micromechanical devices; Monitoring; Optical interferometry; Optical microscopy; Performance evaluation; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location
Polyana
Print_ISBN
978-966-2191-00-4
Type
conf
DOI
10.1109/MEMSTECH.2008.4558749
Filename
4558749
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