DocumentCode
2047765
Title
The main points of the microelectromechanical systems development
Author
Yuriy, Hirnyak
Author_Institution
Precision Mech. Dept., Lviv Polytech. Nat. Univ., Lviv
fYear
2008
fDate
21-24 May 2008
Firstpage
103
Lastpage
104
Abstract
In this paper the basic MEMS structure and main development problems are considered. It´s also accented on the design of the most used types of MEMS parts and the most popular MEMS applications are mentioned. In this paper the main points and tasks of the microelectromechanical systems development are described.
Keywords
micromechanical devices; MEMS structure; microelectromechanical systems development; Actuators; Arm; Costs; Current; Electrodes; Electromagnetic forces; Microelectromechanical systems; Micromechanical devices; Organic materials; Production; MEMS development; main tasks; structure;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location
Polyana
Print_ISBN
978-966-2191-00-4
Type
conf
DOI
10.1109/MEMSTECH.2008.4558754
Filename
4558754
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