Title :
VHDL-AMS — model for capacitive interdigital accelerometer
Author :
Zaharyuk, Roman ; Teslyuk, Vasyl ; Farmaga, Ihor ; Alshawabkeh, Hamza Ali Yousef
Abstract :
In this paper, is developed VHDL-AMS model for capacitive microaccelerometer of IDT construction for design on the schematic design level. Presented analysis results of the developed model.
Keywords :
accelerometers; capacitive sensors; hardware description languages; microsensors; IDT construction; VHDL-AMS; capacitive interdigital accelerometer; hardware description languages; microsensors; Acceleration; Accelerometers; Capacitance; Capacitors; Electrical equipment industry; Electrostatics; Mathematical model; Seismic measurements; Vibration measurement; Voltage; VHDL-AMS; capacitive accelerometer;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558761
