Title :
VHDL-AMS model of mechanical elements of MEMS tuning fork gyroscope for the schematic level of computer-aided design
Author :
Holovatyy, Andriy ; Lobur, Mykhaylo ; Teslyuk, Vasyl
Author_Institution :
Andriy Holovatyy - Dept. of CAD Syst., Lviv Polytech. Nat. Univ., Lviv
Abstract :
Iii the paper VHDL-AMS model for computer- aided design of MEMS tuning fork gyroscope has been created. The created model allows to model drive and sense vibrations, variations of Coriolis acceleration, capacitance and current changes of the device depending on the applied angular velocity, and also to make its functioning analysis on the schematic level of computer- aided design.
Keywords :
CAD; angular velocity measurement; gyroscopes; hardware description languages; mechanical engineering computing; micromechanical devices; Coriolis acceleration; MEMS tuning fork gyroscope; VHDL-AMS model; angular velocity; computer- aided design; computer-aided design; functioning analysis; schematic level; Angular velocity; Capacitance; Capacitors; Design automation; Drives; Gyroscopes; Mathematical model; Micromachining; Micromechanical devices; Vibrations; Coriolis force; MEMS tuning fork gyroscope; Microelectromechanical systems (MEMS); VHDL-AMS model; angular rotation rate; micromachining technologies;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558762
