Title :
The method for automated design of VHDL-AMS models of MEMS elements on circuit level
Author :
Telsyuk, V. ; Alomari, Tariq Moho Taisir Ali ; Denysyuk, Pavlo ; Kernytskyy, A.
Abstract :
A method is offered to increase the level of automation of process of VHDL-AMS models design of MEMS element operating under different physical laws and effects.
Keywords :
circuit CAD; hardware description languages; micromechanical devices; MEMS elements; VHDL-AMS models; automated design; circuit level; Capacitors; Circuits; Design automation; Design methodology; Mathematical model; Mechanical sensors; Micromechanical devices; Microsensors; Piezoresistive devices; Silicon; MEMC; VHDL-AMS; circuit level;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-966-2191-00-4
DOI :
10.1109/MEMSTECH.2008.4558763
