Ultra-low-profile micromachined power inductors with highly laminated NiFe cores: application to low MHz DC-DC converters

Author

Jin-Woo Park ; Allen, M.G.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2003

fDate

March 30 2003-April 3 2003

Abstract

Micromachined inductors with sub-mm profiles and comparable electrical performance to thicker, commercially-available surface-mount devices, have been fabricated and characterized for low MHz DC-DC converters. The fabrication approach involves micron-scale lamination of nickel-iron cores, combined with 3D-micromachined copper windings. The dimensions of the fabricated inductor are 11.5 mm/spl times/5.7 mm/spl times/0.65 mm, and the DC resistance is 190 m/spl Omega/. Use of this inductor in a prototype DC-DC boost converter circuit (6 V-9 V) yielded 1.6 W power output at 84% efficiency.

Keywords

DC-DC power convertors; Q-factor; inductance; iron alloys; micromechanical devices; nickel alloys; power inductors; windings; 1.6 W; 190 ohmm; DC-DC boost converter circuit; NiFe; NiFe cores; electrical properties; micromachined copper windings; micromachined power inductors; surface mount devices; Circuits; Copper; DC-DC power converters; Fabrication; Frequency; Inductors; Magnetic anisotropy; Magnetic films; Magnetic flux; Perpendicular magnetic anisotropy;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2003. INTERMAG 2003. IEEE International

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7647-1

Type

conf

DOI

10.1109/INTMAG.2003.1230537

Filename

1230537